May 2, 2024

Unlocking the Secrets of Laser-Induced Periodic Surface Structures on Silicon

To consistently produce LIPSS with manageable residential or commercial properties and attributes for particular applications, it is vital to comprehend which laser sources should be utilized for which specific need.
The researchers used two different femtosecond lasers on the substrate. In one experiment, a titanium and sapphire (Ti: Sapphire) laser system with pulses of 0.8 µm was used to structure the silicon at energies higher than the band-gap energy. In the other experiment, the researchers used a free-electron laser at mid-infrared pulses of 11.4 µm, which might penetrate the effect at energies lower than the sample band-gap energy.” When the Ti: Sapphire laser was used, the observed LIPSS retained the highly crystalline nature of the silicon however appeared to take on some residual strain.

By utilizing a Ti: Sapphire laser and a mid-infrared free-electron laser (MIR-FEL) to structure silicon, scientists have shown how laser-induced routine surface structure (LIPSS) varies depending upon the laser properties. Credit: Reina Miyagawa of Nagoya Institute of Technology
Scientists have actually identified the impacts of the option of laser on LIPSS, providing insight into crucial manufacturing parameters.
The optical and electronic gadgets that we use on a daily basis, such as smart phones, LEDs, and solar cells utilize transistors and other constituents that are regularly getting smaller and more compact. With an ever-growing requirement for calculating power, storage, and energy performance, this pattern will just continue to new extremes.
Making such small elements for electronic devices requires the machining and preparation of structures on sub-micron scales, as much as hundreds of times smaller sized than the width of a human hair. But current approaches for the nanofabrication of surface areas use photolithography and e-beam lithography– approaches that are made complex, exceptionally expensive, usually unattainable, and require high levels of know-how.

Laser-induced periodic surface area structure (LIPSS) has been earmarked as a novel and prospective alternative to these techniques. In LIPSS, femtosecond lasers are utilized to provide ultrashort laser pulses that spontaneously cause the development of regular patterns on the surface that are much smaller sized than the laser wavelength.
A popular specification in LIPSS is the choice of laser wavelength, which straight affects the periodicity of the formed structures. Other criteria have actually remained unidentified. The major concerns relating to the standardized usage of LIPSS consist of the quality of the formed surface area structure, specifically the crystallinity of the substrate, capacity for flaws, and pressure. To consistently produce LIPSS with controllable properties and characteristics for particular applications, it is important to understand which laser sources should be used for which specific requirement.
Through a suitable choice of laser homes, laser-induced period surface structure (LIPSS) can be tuned and tailored for specific applications by manipulating its defects, stress, and periodicity. Credit: Reina Miyagawa of Nagoya Institute of Technology
To address these concerns in more depth, a Japanese research study cooperation led by scientists from the Nagoya Institute of Technology, has now straight investigated the various criteria that are influenced by laser option. The work, in collaboration with Osaka University, Tokai University, Kyoto University, and the Japan Atomic Energy Agency (JAEA), was led by Assistant Professor Reina Miyagawa of the Nagoya Institute of Technology, alongside Associate Professor Norimasa Ozaki of Osaka University, and Professor Masaki Hashida of Tokai University, who is also a scientist at Kyoto University. Their findings have been published in the journal Scientific Reports.
” In our study, we picked silicon as a substrate, as it is a material utilized in many optoelectronic gadgets the world over, like transistors, smart phones, and solar cells,” describes Dr. Miyagawa.
The researchers used two various femtosecond lasers on the substrate. In one experiment, a titanium and sapphire (Ti: Sapphire) laser system with pulses of 0.8 µm was utilized to structure the silicon at energies greater than the band-gap energy. In the other experiment, the scientists used a free-electron laser at mid-infrared pulses of 11.4 µm, which could penetrate the result at energies lower than the sample band-gap energy. The analysis of the LIPSS samples was done both microscopically and macroscopically. The tiny crystallinity and pureness were studied utilizing transmission electron microscopy (TEM), while a more macroscopic analysis of the strain and stability of the broader structure was investigated using synchrotron high-energy X-ray diffraction (XRD).
” When the Ti: Sapphire laser was used, the observed LIPSS maintained the highly crystalline nature of the silicon however seemed to handle some residual stress. On the other hand, the LIPSS which was formed by the mid-infrared free-electron laser caused some plainly visible problems. Nevertheless, there was no observable strain to the system whatsoever,” includes Dr. Miyagawa.
This research study makes up the first report on the high-resolution, macroscopic and tiny observations of crystallinity in LIPSS utilizing synchrotron high-energy x-ray diffraction. The findings indicate how LIPSS can be tuned and customized for particular applications by manipulating its defects, stress, and periodicity, through a suitable option of laser. Continued research study along these lines can further open the path towards the prevalent application of LIPSS to accomplish the affordable, easy, and accessible fabrication of nanostructured surface areas for applications in a broad range of optoelectronic devices.
Recommendation: “Crystallinity in regular nanostructure surface on Si substrates caused by near- and mid-infrared femtosecond laser irradiation” by Reina Miyagawa, Daisuke Kamibayashi, Hirotaka Nakamura, Masaki Hashida, Heishun Zen, Toshihiro Somekawa, Takeshi Matsuoka, Hiroyuki Ogura, Daisuke Sagae, Yusuke Seto, Takahisa Shobu, Aki Tominaga, Osamu Eryu and Norimasa Ozaki, 5 December 2022, Scientific Reports.DOI: 10.1038/ s41598-022-25365-1.